Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hui-Shen Shih0
Chi-Chih Chuang0
Chi-Min Yu0
Date of Patent
November 9, 2010
0Patent Application Number
119281550
Date Filed
October 30, 2007
0Patent Primary Examiner
Patent abstract
The present invention relates to a method of supplying the polishing liquid by periodically interrupt the supply of the polishing liquid, thus avoid over-supply or wastage of the polishing liquid. Hence, the consumption of the polishing liquid can be decreased and the production cost can be lower.
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