US Patent 7828625 Method of supplying polishing liquid
Patent 7828625 was granted and assigned to United Microelectronics Corporation on November, 2010 by the United States Patent and Trademark Office.
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Patent abstract
The present invention relates to a method of supplying the polishing liquid by periodically interrupt the supply of the polishing liquid, thus avoid over-supply or wastage of the polishing liquid. Hence, the consumption of the polishing liquid can be decreased and the production cost can be lower.
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Patent Inventor Names
Chi-Chih Chuang0
Chi-Min Yu0
Hui-Shen Shih0
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US Patent 07828625 Method of supplying polishing liquid US Patent 7828625 Method of supplying polishing liquid
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Patent Number
078286250
Patent Number
78286250
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Official Website
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Infobox
Is a
Current Assignee
0
Patent Jurisdiction
Patent Number
078286250
Date of Patent
November 9, 2010
0Patent Application Number
119281550
Date Filed
October 30, 2007
0Official Website
Patent Primary Examiner
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US Patent 07828625 Method of supplying polishing liquid
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07828625
Date of patent
November 9, 2010
Patent application number
11928155
Date Filed
October 30, 2007
Patent primary examiner
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