Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marcus Adrianus Van De Kerkhof0
Asis Uasghiri0
M'hamed Akhssay0
Mamoun El Ouasdad0
Date of Patent
November 9, 2010
0Patent Application Number
117137870
Date Filed
March 5, 2007
0Patent Primary Examiner
Patent abstract
In a device manufacturing method using a lithographic apparatus, corrections to the dose are applied, within and/or between fields, to compensate for CD variations due to heating of elements of the projection system of the lithographic apparatus.
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