US Patent 7829249 Device manufacturing method, computer program and lithographic apparatus
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Patent abstract
In a device manufacturing method using a lithographic apparatus, corrections to the dose are applied, within and/or between fields, to compensate for CD variations due to heating of elements of the projection system of the lithographic apparatus.
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Patent Inventor Names
Asis Uasghiri0
M'hamed Akhssay0
Mamoun El Ouasdad0
Marcus Adrianus Van De Kerkhof0
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US Patent 07829249 Device manufacturing method, computer program and lithographic apparatus US Patent 7829249 Device manufacturing method, computer program and lithographic apparatus
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Patent Number
078292490
Patent Number
78292490
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Official Website
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Patent Jurisdiction
Patent Number
078292490
Date of Patent
November 9, 2010
0Patent Application Number
117137870
Date Filed
March 5, 2007
0Official Website
Patent Primary Examiner
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US Patent 07829249 Device manufacturing method, computer program and lithographic apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07829249
Date of patent
November 9, 2010
Patent application number
11713787
Date Filed
March 5, 2007
Patent primary examiner
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