Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshiteru Fukuda0
Takayuki Ishii0
Tomohiro Iseki0
Date of Patent
November 16, 2010
0Patent Application Number
115748880
Date Filed
September 13, 2005
0Patent Primary Examiner
Patent abstract
To perform a series of resist coating treatments from application of a resist solution to removal of a resist film on a wafer edge portion in a shorter time.
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