Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Karl-Heinz Hohenwarter0
Date of Patent
November 23, 2010
0Patent Application Number
105496200
Date Filed
March 12, 2004
0Patent Primary Examiner
Patent abstract
In a spin-chuck with plural collector levels, a separate exhaust controller is provided for each level. This permits selectively varying gas flow conditions among the collector levels, so that the ambient pressure at one level does not adversely affect device performance in an adjacent level.
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