US Patent 7837803 Device and method for wet treating disc-shaped articles
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Patent abstract
In a spin-chuck with plural collector levels, a separate exhaust controller is provided for each level. This permits selectively varying gas flow conditions among the collector levels, so that the ambient pressure at one level does not adversely affect device performance in an adjacent level.
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Patent Inventor Names
Karl-Heinz Hohenwarter0
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US Patent 07837803 Device and method for wet treating disc-shaped articles US Patent 7837803 Device and method for wet treating disc-shaped articles
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Patent Number
078378030
Patent Number
78378030
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Patent Jurisdiction
Patent Number
078378030
Date of Patent
November 23, 2010
0Patent Application Number
105496200
Date Filed
March 12, 2004
0Official Website
Patent Primary Examiner
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US Patent 07837803 Device and method for wet treating disc-shaped articles
Infobox
Is a
Patent jurisdiction
Patent number
07837803
Date of patent
November 23, 2010
Patent application number
10549620
Date Filed
March 12, 2004
Patent primary examiner
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