US Patent 7839483 Lithographic apparatus, device manufacturing method and a control system
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Patent abstract
A capillary passage is formed between a substrate holder and an edge structure. Along the capillary passage are arranged a plurality of electrodes which, when charged, become liquidphilic. The electrodes may be used to split droplets of liquid and pump the liquid along the capillary passage.
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Patent Inventor Names
Martinus Hendrikus Antonius Leenders0
Nicolaas Rudolf Kemper0
Sjoerd Nicolaas Lambertus Donders0
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US Patent 07839483 Lithographic apparatus, device manufacturing method and a control system US Patent 7839483 Lithographic apparatus, device manufacturing method and a control system
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Patent Number
078394830
Patent Number
78394830
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Patent Jurisdiction
Patent Number
078394830
Date of Patent
November 23, 2010
0Patent Application Number
113192150
Date Filed
December 28, 2005
0Official Website
Patent Primary Examiner
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US Patent 07839483 Lithographic apparatus, device manufacturing method and a control system
Infobox
Is a
Patent jurisdiction
Patent number
07839483
Date of patent
November 23, 2010
Patent application number
11319215
Date Filed
December 28, 2005
Patent primary examiner
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