Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Edwin Cornelis Kadijk0
Joost Jeroen Ottens0
Nicolaas Rudolf Kemper0
Sjoerd Nicolaas Lambertus Donders0
Sergei Shulepov0
Date of Patent
October 15, 2024
0Patent Application Number
180873200
Date Filed
December 22, 2022
0Patent Citations
Patent Primary Examiner
Patent abstract
Embodiments of a drain in a lithographic projection apparatus are described that have, for example, a feature which reduces inflow of gas into the drain during a period when no liquid is present in the drain. In one example, a passive liquid removal mechanism is provided such that the pressure of gas in the drain is equal to the ambient gas pressure and in another embodiment a flap is provided to close off a chamber during times when no liquid needs removing.
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