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US Patent 12117721 Lithographic apparatus and device manufacturing method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
December 22, 2022
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Date of Patent
October 15, 2024
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Patent Application Number
18087320
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Patent Citations
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US Patent 7616383 Lithographic apparatus and device manufacturing method
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US Patent 7199858 Lithographic apparatus and device manufacturing method
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US Patent 7839483 Lithographic apparatus, device manufacturing method and a control system
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US Patent 6918404 Irrigation and drainage based on hydrodynamic unsaturated fluid flow
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US Patent 7066586 Ink refill and recharging system
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Patent Inventor Names
Edwin Cornelis Kadijk
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Joost Jeroen Ottens
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Nicolaas Rudolf Kemper
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Sjoerd Nicolaas Lambertus Donders
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Sergei Shulepov
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12117721
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Patent Primary Examiner
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Mesfin T Asfaw
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CPC Code
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H01L 21/0274
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G03F 7/2043
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G03F 7/2041
0
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G03F 7/70716
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G03F 7/70341
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G03B 27/42
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