Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 10, 2009
Patent Application Number
10847661
Date Filed
May 18, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A lithographic projection apparatus is disclosed in which a liquid supply system provides a liquid between the projection system and the substrate. An active drying station is provided to actively remove the liquid from the substrate W or other objects after immersion of all or part of a surface of the substrate W or other objects.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
