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US Patent 7616383 Lithographic apparatus and device manufacturing method

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Patent Citations Received
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US Patent 12117721 Lithographic apparatus and device manufacturing method
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Patent abstract

A lithographic projection apparatus is disclosed in which a liquid supply system provides a liquid between the projection system and the substrate. An active drying station is provided to actively remove the liquid from the substrate W or other objects after immersion of all or part of a surface of the substrate W or other objects.

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US Patent 07616383 Lithographic apparatus and device manufacturing method US Patent 7616383 Lithographic apparatus and device manufacturing method

Infobox
Patent Number
0761638300
Patent Number
761638300
Edits on 22 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0761638300
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edited on 24 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
076163830
Date of Patent
November 10, 2009
0
Patent Application Number
108476610
Date Filed
May 18, 2004
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=076163830
Patent Primary Examiner
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John A McPherson
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Edits on 27 Sep, 2022
"Entity importer update"
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Golden AI
edited on 27 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
076163830
Date of Patent
November 10, 2009
0
Patent Application Number
108476610
Date Filed
May 18, 2004
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=076163830
Patent Primary Examiner
‌
John A McPherson
0
Edits on 18 Jun, 2022
"Entity importer update"
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07616383
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 US Patent 07616383 Lithographic apparatus and device manufacturing method

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07616383
Date of patent
November 10, 2009
Patent application number
10847661
Date Filed
May 18, 2004
Patent primary examiner
‌
John A McPherson

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