US Patent 7847683 Emergency machine off feature with safety control interface

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

78476830

Patent Inventor Names

Joseph P. DeGeorge0

Scott M. Hargash0

Robert R. Young0

William T. Petry0

William R. Copeland0

Gregory S. Boettcher0

Date of Patent

December 7, 2010

Patent Application Number

118540350

Date Filed

September 12, 2007

Patent Primary Examiner

‌

Julie Lieu

Patent abstract

An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.

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