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US Patent 7847683 Emergency machine off feature with safety control interface

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Edits on 31 Oct, 2023
"Add patent abstract"
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edited on 31 Oct, 2023
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Patent abstract

An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.

Edits on 18 Sep, 2023
"Add patent inventor(s)"
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edited on 18 Sep, 2023
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Patent Inventor Names
Gregory S. Boettcher0
Joseph P. DeGeorge0
Robert R. Young0
Scott M. Hargash0
William R. Copeland0
William T. Petry0
Edits on 22 Jul, 2023
"Remove website redirecting to Patent Public Search front page"
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edited on 22 Jul, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=078476830
Edits on 25 May, 2023
"Remove leading 0 from patent number"
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edited on 25 May, 2023
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US Patent 07847683 Emergency machine off feature with safety control interface US Patent 7847683 Emergency machine off feature with safety control interface

Infobox
Patent Number
078476830
Patent Number
78476830
Edits on 3 Apr, 2023
"Entity importer update"
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Golden AI
edited on 3 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
078476830
Date of Patent
December 7, 2010
0
Patent Application Number
118540350
Date Filed
September 12, 2007
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=078476830
Patent Primary Examiner
‌
Julie Lieu
0
Edits on 4 Jun, 2022
"Entity importer update"
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edited on 4 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07847683
Edits on 6 Dec, 2021
"Created via: Entity Importer"
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created this topic on 6 Dec, 2021
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 US Patent 07847683 Emergency machine off feature with safety control interface

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07847683
Date of patent
December 7, 2010
Patent application number
11854035
Date Filed
September 12, 2007
Patent primary examiner
‌
Julie Lieu

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