Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Olester Benson, Jr.0
David J. Plaut0
Eric G. Larson0
Joel A. Getschel0
Date of Patent
December 28, 2010
Patent Application Number
12399054
Date Filed
March 6, 2009
Patent Primary Examiner
Patent abstract
Provided are a tape, apparatus, and method that relate generally to a single layer adhesive which functions as a dicing tape and also as a die attach adhesive for dicing thinned wafers and subsequent die attach operations of the diced chips in semiconductor device fabrication. The tape, apparatus, and method include a backing with a surface modification that includes a pattern.
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