Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marc Castagna0
Matthew Bray0
Date of Patent
December 28, 2010
Patent Application Number
12328581
Date Filed
December 4, 2008
Patent Primary Examiner
Patent abstract
Imprecisely located defects are imaged by milling a series of slices and performing a light, preferential etch to provide a topographical interface between materials having similar secondary electron emission characteristics. The slices are sufficiently small to capture small defects, but are sufficiently large to overcome problems with redeposition.
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