US Patent 7858936 Slice and view with decoration
Patent 7858936 was granted and assigned to FEI Company on December, 2010 by the United States Patent and Trademark Office.
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Patent abstract
Imprecisely located defects are imaged by milling a series of slices and performing a light, preferential etch to provide a topographical interface between materials having similar secondary electron emission characteristics. The slices are sufficiently small to capture small defects, but are sufficiently large to overcome problems with redeposition.
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Patent Inventor Names
Marc Castagna0
Matthew Bray0
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Official Website
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US Patent 07858936 Slice and view with decoration US Patent 7858936 Slice and view with decoration
Infobox
Patent Number
07858936
Patent Number
7858936
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US Patent 07858936 Slice and view with decoration
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07858936
Date of patent
December 28, 2010
Patent application number
12328581
Date Filed
December 4, 2008
Patent primary examiner
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