US Patent 7867066 Polishing pad
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Patent abstract
A polishing pad having a novel structure, which is applicable to highly accurate various polishing process, such as a CMP process, is provided. An annular rear plane groove (22) extending in a circumferential direction is formed on a rear plane (20) of the polishing pad.
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US Patent 07867066 Polishing pad US Patent 7867066 Polishing pad
Infobox
Patent Number
0786706600
Patent Number
786706600
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Golden AI
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Official Website
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Infobox
Is a
Patent Jurisdiction
Patent Number
078670660
Date of Patent
January 11, 2011
0Patent Application Number
118131410
Date Filed
December 19, 2005
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
078670660
Date of Patent
January 11, 2011
0Patent Application Number
118131410
Date Filed
December 19, 2005
0Official Website
Patent Primary Examiner
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Golden AI
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Golden AI
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US Patent 07867066 Polishing pad
Infobox
Is a
Patent jurisdiction
Patent number
07867066
Date of patent
January 11, 2011
Patent application number
11813141
Date Filed
December 19, 2005
Patent primary examiner
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