Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tue Nguyen0
Craig Alan Bercaw0
Tai Dung Nguyen0
Date of Patent
January 11, 2011
0Patent Application Number
114436210
Date Filed
May 31, 2006
0Patent Primary Examiner
Patent abstract
Systems and methods are disclosed to perform semiconductor processing with a process chamber; a flash lamp adapted to be repetitively triggered; and a controller coupled to the control input of the flash lamp to trigger the flash lamp. The system can deploy a solid state plasma source in parallel with the flash lamp in wafer processing.
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