US Patent 7867905 System and method for semiconductor processing
Patent 7867905 was granted and assigned to Tegal Corporation on January, 2011 by the United States Patent and Trademark Office.
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Patent abstract
Systems and methods are disclosed to perform semiconductor processing with a process chamber; a flash lamp adapted to be repetitively triggered; and a controller coupled to the control input of the flash lamp to trigger the flash lamp. The system can deploy a solid state plasma source in parallel with the flash lamp in wafer processing.
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Patent Inventor Names
Craig Alan Bercaw0
Tai Dung Nguyen0
Tue Nguyen0
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US Patent 07867905 System and method for semiconductor processing US Patent 7867905 System and method for semiconductor processing
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Patent Number
078679050
Patent Number
78679050
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078679050
Date of Patent
January 11, 2011
0Patent Application Number
114436210
Date Filed
May 31, 2006
0Official Website
Patent Primary Examiner
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US Patent 07867905 System and method for semiconductor processing
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07867905
Date of patent
January 11, 2011
Patent application number
11443621
Date Filed
May 31, 2006
Patent primary examiner
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