Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joseph C. Olson0
Atul Gupta0
Date of Patent
January 11, 2011
0Patent Application Number
111459490
Date Filed
June 7, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A technique for ion beam angle spread control is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for ion beam angle spread control. The method may comprise directing one or more ion beams at a substrate surface at two or more different incident angles, thereby exposing the substrate surface to a controlled spread of ion beam incident angles.
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