US Patent 7871853 Plasma doping method and apparatus employed in the same

Patent 7871853 was granted and assigned to Panasonic on January, 2011 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Panasonic

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7871853

Date of Patent

January 18, 2011

Patent Application Number

11887456

Date Filed

March 28, 2006

Patent Primary Examiner

‌

Dung A. Le

Patent abstract

A plasma doping method and a plasma doping apparatus, having a superior in-plane uniformity of an amorphous layer formed on a sample surface, are provided.

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