US Patent 7871853 Plasma doping method and apparatus employed in the same
Patent 7871853 was granted and assigned to Panasonic on January, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A plasma doping method and a plasma doping apparatus, having a superior in-plane uniformity of an amorphous layer formed on a sample surface, are provided.
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US Patent 07871853 Plasma doping method and apparatus employed in the same US Patent 7871853 Plasma doping method and apparatus employed in the same
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Patent Number
0787185300
Patent Number
787185300
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078718530
Date of Patent
January 18, 2011
0Patent Application Number
118874560
Date Filed
March 28, 2006
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078718530
Date of Patent
January 18, 2011
0Patent Application Number
118874560
Date Filed
March 28, 2006
0Official Website
Patent Primary Examiner
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US Patent 07871853 Plasma doping method and apparatus employed in the same
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07871853
Date of patent
January 18, 2011
Patent application number
11887456
Date Filed
March 28, 2006
Patent primary examiner
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