Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Carlo Salvesen0
Pavel Adamec0
Ivo Liska0
Date of Patent
January 18, 2011
0Patent Application Number
121811710
Date Filed
July 28, 2008
0Patent Primary Examiner
Patent abstract
A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.
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