US Patent 7872239 Electrostatic lens assembly
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Patent abstract
A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.
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Patent Inventor Names
Carlo Salvesen0
Ivo Liska0
Pavel Adamec0
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Official Website
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US Patent 07872239 Electrostatic lens assembly US Patent 7872239 Electrostatic lens assembly
Infobox
Patent Number
078722390
Patent Number
78722390
Edits on 23 Sep, 2022
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Patent Jurisdiction
Patent Number
078722390
Date of Patent
January 18, 2011
0Patent Application Number
121811710
Date Filed
July 28, 2008
0Official Website
Patent Primary Examiner
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US Patent 07872239 Electrostatic lens assembly
Infobox
Is a
Patent jurisdiction
Patent number
07872239
Date of patent
January 18, 2011
Patent application number
12181171
Date Filed
July 28, 2008
Patent primary examiner
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