Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 25, 2011
Patent Application Number
11410756
Date Filed
April 24, 2006
Patent Primary Examiner
Patent abstract
The present invention provides a polishing pad. The polishing pad comprises a transparent part and a high molecular weight layer. The transparent part has an uneven side surface and the profile of the uneven side surface is selected from a group consisting of a serrated shape, a wavy shape and a toothed shape. The high molecular weight layer encircles the transparent part.
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