US Patent 7875335 Method of fabricating polishing pad having detection window thereon
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Patent abstract
The present invention provides a polishing pad. The polishing pad comprises a transparent part and a high molecular weight layer. The transparent part has an uneven side surface and the profile of the uneven side surface is selected from a group consisting of a serrated shape, a wavy shape and a toothed shape. The high molecular weight layer encircles the transparent part.
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US Patent 07875335 Method of fabricating polishing pad having detection window thereon US Patent 7875335 Method of fabricating polishing pad having detection window thereon
Infobox
Patent Number
0787533500
Patent Number
787533500
Edits on 26 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
078753350
Date of Patent
January 25, 2011
0Patent Application Number
114107560
Date Filed
April 24, 2006
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
078753350
Date of Patent
January 25, 2011
0Patent Application Number
114107560
Date Filed
April 24, 2006
0Official Website
Patent Primary Examiner
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Golden AI
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US Patent 07875335 Method of fabricating polishing pad having detection window thereon
Infobox
Is a
Patent jurisdiction
Patent number
07875335
Date of patent
January 25, 2011
Patent application number
11410756
Date Filed
April 24, 2006
Patent primary examiner
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