Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takeshi Taniguchi0
Koichi Ikeda0
Masahiro Tada0
Takashi Kinoshita0
Date of Patent
January 25, 2011
0Patent Application Number
115307740
Date Filed
September 11, 2006
0Patent Primary Examiner
Patent abstract
A micromachine for a high-frequency filter which has a high Q value and a higher frequency band is provided. The micromachine includes an electrode provided on a substrate, an inter-layer insulation film composed of a first insulation film and a second insulation film which are provided on the substrate in the state of covering the electrode, a hole pattern provided in the second insulation film in the state of reaching the electrode, and a belt-like vibrator electrode provided on the second insulation film so as to cross the upper side of a space portion constituted of the inside of the hole pattern.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
