US Patent 7875940 Micromachine and production method thereof
Patent 7875940 was granted and assigned to Sony on January, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A micromachine for a high-frequency filter which has a high Q value and a higher frequency band is provided. The micromachine includes an electrode provided on a substrate, an inter-layer insulation film composed of a first insulation film and a second insulation film which are provided on the substrate in the state of covering the electrode, a hole pattern provided in the second insulation film in the state of reaching the electrode, and a belt-like vibrator electrode provided on the second insulation film so as to cross the upper side of a space portion constituted of the inside of the hole pattern.
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Patent Inventor Names
Koichi Ikeda0
Masahiro Tada0
Takashi Kinoshita0
Takeshi Taniguchi0
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US Patent 07875940 Micromachine and production method thereof US Patent 7875940 Micromachine and production method thereof
Infobox
Patent Number
078759400
Patent Number
78759400
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Official Website
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Infobox
Is a
Current Assignee
0
Patent Jurisdiction
Patent Number
078759400
Date of Patent
January 25, 2011
0Patent Application Number
115307740
Date Filed
September 11, 2006
0Official Website
Patent Primary Examiner
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US Patent 07875940 Micromachine and production method thereof
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07875940
Date of patent
January 25, 2011
Patent application number
11530774
Date Filed
September 11, 2006
Patent primary examiner
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