Patent 7876457 was granted and assigned to Nikon Metrology on January, 2011 by the United States Patent and Trademark Office.
A laser metrology system for determining a location of a target utilizes a laser projector having a laser source for projecting a laser beam. A rotating head directs the laser beam in a lateral direction. A sensor associated with the laser projector is capable of sensing the laser beam. A reflective target is configured to reflect the laser beam projector from the laser source toward the sensor in a manner indicative of the angle of the rotating head and the pulse of the laser beam to determine location of the target.