US Patent 7876457 Laser metrology system and method
Patent 7876457 was granted and assigned to Nikon Metrology on January, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 13, 2008
0
Date of Patent
January 25, 2011
0
Patent Application Number
12138586
0
Patent Inventor Names
Kurt D. Rueb
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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