Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshihumi Taniguchi0
Kazutoshi Kaji0
Shohei Terada0
Date of Patent
February 15, 2011
Patent Application Number
12183726
Date Filed
July 31, 2008
Patent Primary Examiner
Patent abstract
A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.
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