US Patent 7888641 Electron microscope with electron spectrometer
Patent 7888641 was granted and assigned to Hitachi on February, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.
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Patent Inventor Names
Kazutoshi Kaji0
Shohei Terada0
Yoshihumi Taniguchi0
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US Patent 07888641 Electron microscope with electron spectrometer US Patent 7888641 Electron microscope with electron spectrometer
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Patent Number
07888641
Patent Number
7888641
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Official Website
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US Patent 07888641 Electron microscope with electron spectrometer
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Is a
Current assignee
Patent jurisdiction
Patent number
07888641
Date of patent
February 15, 2011
Patent application number
12183726
Date Filed
July 31, 2008
Patent primary examiner
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