Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sunny Kedia0
Abdur Rub Abdur Rahman0
Shekhar Bhansali0
Date of Patent
February 22, 2011
0Patent Application Number
118286390
Date Filed
July 26, 2007
0Patent Primary Examiner
Patent abstract
The present invention illustrates a bulk silicon etching technique that yields straight sidewalls, through wafer structures in very short times using standard silicon wet etching techniques. The method of the present invention employs selective porous silicon formation and dissolution to create high aspect ratio structures with straight sidewalls for through wafer MEMS processing.
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