US Patent 7893293 Chemically amplified positive resist composition

Patent 7893293 was granted and assigned to Sumitomo Chemical on February, 2011 by the United States Patent and Trademark Office.

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Date of Patent

February 22, 2011

Patent Application Number

12143268

Date Filed

June 20, 2008

Patent Primary Examiner

Patent abstract

A chemically amplified positive resist composition comprising (A) a resin which comprises (i) a polymerization unit represented by the formula (I):

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