US Patent 7893293 Chemically amplified positive resist composition
Patent 7893293 was granted and assigned to Sumitomo Chemical on February, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A chemically amplified positive resist composition comprising (A) a resin which comprises (i) a polymerization unit represented by the formula (I):
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US Patent 07893293 Chemically amplified positive resist composition US Patent 7893293 Chemically amplified positive resist composition
Infobox
Patent Number
0789329300
Patent Number
789329300
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078932930
Date of Patent
February 22, 2011
0Patent Application Number
121432680
Date Filed
June 20, 2008
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078932930
Date of Patent
February 22, 2011
0Patent Application Number
121432680
Date Filed
June 20, 2008
0Official Website
Patent Primary Examiner
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US Patent 07893293 Chemically amplified positive resist composition
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07893293
Date of patent
February 22, 2011
Patent application number
12143268
Date Filed
June 20, 2008
Patent primary examiner
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