Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Charles Otis0
Jeffrey R. Pollard0
Mark C. Huth0
Mehrgan Khavari0
Date of Patent
February 22, 2011
0Patent Application Number
107132980
Date Filed
November 14, 2003
0Patent Primary Examiner
Patent abstract
The described embodiments relate to laser micromachining a substrate. One exemplary method includes forming a feature into a substrate, at least in part, by directing a laser beam at the substrate. During at least a portion of said forming, the method includes supplying liquid to at least a first region of the feature along a first liquid supply path and supplying liquid to at least a second different region of the feature along at least a second liquid supply path.
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