Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sjoerd Nicolaas Lambertus Donders0
Matthew Lipson0
Roel De Jonge0
Ronald Wilklow0
Bob Streefkerk0
Johannes Catharinus Hubertus Mulkens0
Marcel Mathijs Theodore Marie Dierichs0
Date of Patent
February 22, 2011
Patent Application Number
10957751
Date Filed
October 5, 2004
Patent Primary Examiner
Patent abstract
A lithographic apparatus is provided in which exposure is carried out by projecting through an aqueous solution of alkali metal halide(s), the solution being in contact with the substrate to be exposed.
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