Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 1, 2011
Patent Application Number
12181335
Date Filed
July 29, 2008
Patent Primary Examiner
Patent abstract
A method of manufacturing a dual contact trench capacitor is provided. The method includes forming a first plate provided within a trench and isolated from a wafer body by a first insulator layer formed in the trench. The method further includes forming a second plate provided within the trench and isolated from the wafer body and the first plate by a second insulator layer formed in the trench.
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