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US Patent 7897504 Method for fabricating semiconductor device

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Edits on 27 Nov, 2023
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edited on 27 Nov, 2023
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Patent abstract

A method for fabricating a semiconductor device, in which a lifting phenomenon can be prevented from occurring in forming an amorphous carbon film on an etched layer having tensile stress. According to the invention, since a compression stress on the etched layer or the amorphous carbon film can be reduced or a compression stress film is formed between the etched layer or the amorphous carbon film to prevent a lifting phenomenon from occurring and thus another pattern can be formed to fabricate a highly integrated semiconductor device.

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edited on 22 Jul, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0789750400
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US Patent 07897504 Method for fabricating semiconductor device US Patent 7897504 Method for fabricating semiconductor device

Infobox
Patent Number
0789750400
Patent Number
789750400
Edits on 3 Apr, 2023
"Entity importer update"
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Golden AI
edited on 3 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
078975040
Date of Patent
March 1, 2011
0
Patent Application Number
117474440
Date Filed
May 11, 2007
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=078975040
Patent Primary Examiner
‌
Matthew S. Smith
0
Edits on 24 Sep, 2022
"Entity importer update"
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Golden AI
edited on 24 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
078975040
Date of Patent
March 1, 2011
0
Patent Application Number
117474440
Date Filed
May 11, 2007
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=078975040
Patent Primary Examiner
‌
Matthew S. Smith
0
Edits on 4 Jun, 2022
"Entity importer update"
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Golden AI
edited on 4 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07897504
Edits on 7 Dec, 2021
"Created via: Entity Importer"
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Golden AI
created this topic on 7 Dec, 2021
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 US Patent 07897504 Method for fabricating semiconductor device

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07897504
Date of patent
March 1, 2011
Patent application number
11747444
Date Filed
May 11, 2007
Patent primary examiner
‌
Matthew S. Smith

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