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US Patent 7901510 Bolt and plasma processing apparatus provided with same

Patent 7901510 was granted and assigned to Tokyo Electron on March, 2011 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
Tokyo Electron
Tokyo Electron
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
79015100
Patent Inventor Names
Makoto Horimizu0
Date of Patent
March 8, 2011
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Patent Application Number
127223070
Date Filed
March 11, 2010
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Patent Primary Examiner
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Maureen Gramaglia
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Patent abstract

A bolt which is driven into a female screw portion disposed in a brittle member in a wear environment includes a head formed of a wear resistant material, a body which is formed of a resin having elasticity or plasticity and has a first male screw portion, and a placed member disposed between the head and the body and formed of a wear resistant resin having elasticity or plasticity. The body further includes a second male screw portion disposed along a central axis of the body and the head includes a female screw portion which the second male screw portion is driven into. The placed member is of a plate shape and has a through hole in its central portion, and a diameter of the through hole is smaller than or equal to a nominal diameter of the first male screw portion and larger than or equal to a nominal diameter of the second male screw portion.

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