US Patent 7901510 Bolt and plasma processing apparatus provided with same
Patent 7901510 was granted and assigned to Tokyo Electron on March, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 11, 2010
0
Date of Patent
March 8, 2011
0
Patent Application Number
12722307
0
Patent Inventor Names
Makoto Horimizu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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