Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 8, 2011
Patent Application Number
12585141
Date Filed
September 4, 2009
Patent Primary Examiner
Patent abstract
The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.
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