US Patent 7901551 Substrate holder and plating apparatus
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Patent abstract
The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.
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US Patent 07901551 Substrate holder and plating apparatus US Patent 7901551 Substrate holder and plating apparatus
Infobox
Patent Number
0790155100
Patent Number
790155100
Edits on 29 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079015510
Date of Patent
March 8, 2011
0Patent Application Number
125851410
Date Filed
September 4, 2009
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079015510
Date of Patent
March 8, 2011
0Patent Application Number
125851410
Date Filed
September 4, 2009
0Official Website
Patent Primary Examiner
Edits on 4 Jun, 2022
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US Patent 07901551 Substrate holder and plating apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07901551
Date of patent
March 8, 2011
Patent application number
12585141
Date Filed
September 4, 2009
Patent primary examiner
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