US Patent 7905109 Rapid cooling system for RTP chamber
All edits
Edits on 27 Nov, 2023
Golden AI
Edits made to:
Article (+494 characters)
Article
Patent abstract
A rapid cooling system for a rapid thermal processing chamber includes a rapid thermal processing chamber having a wafer support for supporting a wafer. A tank having a supply of cooling liquid is provided in fluid communication with the chamber. A pump is provided in fluid communication with the rapid thermal processing chamber and the tank for pumping the cooling liquid from the tank to the chamber and cooling the wafer during the cooling phase of rapid thermal processing.
Edits on 20 May, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07905109 Rapid cooling system for RTP chamber US Patent 7905109 Rapid cooling system for RTP chamber
Infobox
Patent Number
0790510900
Patent Number
790510900
Edits on 23 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079051090
Date of Patent
March 15, 2011
0Patent Application Number
112267210
Date Filed
September 14, 2005
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079051090
Date of Patent
March 15, 2011
0Patent Application Number
112267210
Date Filed
September 14, 2005
0Official Website
Patent Primary Examiner
Edits on 4 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 7 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07905109 Rapid cooling system for RTP chamber
Infobox
Is a
Patent jurisdiction
Patent number
07905109
Date of patent
March 15, 2011
Patent application number
11226721
Date Filed
September 14, 2005
Patent primary examiner
Find more entities like US Patent 7905109 Rapid cooling system for RTP chamber
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
