Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazuo Miyoshi0
Yoshimi Watabe0
Shusaku Yamasaki0
Hiroyuki Otsuka0
Masashi Ueda0
Date of Patent
March 29, 2011
0Patent Application Number
105460450
Date Filed
January 20, 2004
0Patent Primary Examiner
Patent abstract
A cooling system for a vacuum processing apparatus is provided with an internal heat conduction path for transfer of heat entering the subject body through the vacuum processing apparatus, a heat radiation path for radiation of the heat to an outside of the vacuum processing apparatus and a heat conduction path for regulation of quantity of heat transfer between the internal heat conduction path and the heat radiation path. Preferably, a heat pipe is applied to the internal heat conduction path.
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