US Patent 7913752 Cooling device for vacuum treatment device
Patent 7913752 was granted and assigned to ISHIKAWAJIMA-HARIMA HEAVY INDUSTRIES CO.,LTD. on March, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A cooling system for a vacuum processing apparatus is provided with an internal heat conduction path for transfer of heat entering the subject body through the vacuum processing apparatus, a heat radiation path for radiation of the heat to an outside of the vacuum processing apparatus and a heat conduction path for regulation of quantity of heat transfer between the internal heat conduction path and the heat radiation path. Preferably, a heat pipe is applied to the internal heat conduction path.
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Patent Inventor Names
Hiroyuki Otsuka0
Kazuo Miyoshi0
Masashi Ueda0
Shusaku Yamasaki0
Yoshimi Watabe0
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Official Website
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US Patent 07913752 Cooling device for vacuum treatment device US Patent 7913752 Cooling device for vacuum treatment device
Infobox
Patent Number
079137520
Patent Number
79137520
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079137520
Date of Patent
March 29, 2011
0Patent Application Number
105460450
Date Filed
January 20, 2004
0Official Website
Patent Primary Examiner
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US Patent 07913752 Cooling device for vacuum treatment device
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07913752
Date of patent
March 29, 2011
Patent application number
10546045
Date Filed
January 20, 2004
Patent primary examiner
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