Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Makoto Tanaka0
Shigehiro Suzuki0
Date of Patent
April 5, 2011
0Patent Application Number
105697830
Date Filed
June 20, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid, with a means (8) for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism (10) for controlling the mass flow rate by varying the valve opening by a valve drive signal.
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