US Patent 7918238 Flow controller and its regulation method
Patent 7918238 was granted and assigned to Hitachi on April, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid, with a means (8) for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism (10) for controlling the mass flow rate by varying the valve opening by a valve drive signal.
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Patent Inventor Names
Makoto Tanaka0
Shigehiro Suzuki0
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US Patent 07918238 Flow controller and its regulation method US Patent 7918238 Flow controller and its regulation method
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Patent Number
079182380
Patent Number
79182380
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Current Assignee
Patent Jurisdiction
Patent Number
079182380
Date of Patent
April 5, 2011
0Patent Application Number
105697830
Date Filed
June 20, 2005
0Official Website
Patent Primary Examiner
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US Patent 07918238 Flow controller and its regulation method
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07918238
Date of patent
April 5, 2011
Patent application number
10569783
Date Filed
June 20, 2005
Patent primary examiner
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