US Patent 7922863 Apparatus for integrated gas and radiation delivery
Patent 7922863 was granted and assigned to Applied Materials on April, 2011 by the United States Patent and Trademark Office.
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Patent abstract
An apparatus for photo-assisted or photo-induced processes is disclosed, comprising a process chamber having an integrated gas and radiation distribution plate. In one embodiment, the plate has one set of apertures for distributing one or more process gases, and another set of apertures for distributing radiation to a process region in the chamber.
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US Patent 07922863 Apparatus for integrated gas and radiation delivery US Patent 7922863 Apparatus for integrated gas and radiation delivery
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Patent Number
0792286300
Patent Number
792286300
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
079228630
Date of Patent
April 12, 2011
0Patent Application Number
116156330
Date Filed
December 22, 2006
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079228630
Date of Patent
April 12, 2011
0Patent Application Number
116156330
Date Filed
December 22, 2006
0Official Website
Patent Primary Examiner
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US Patent 07922863 Apparatus for integrated gas and radiation delivery
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07922863
Date of patent
April 12, 2011
Patent application number
11615633
Date Filed
December 22, 2006
Patent primary examiner
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